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UV Optical Components
UV Optical Components

UV Optical Components

Making the most of a UV laser beam.

Attenuators

Attenuator Module, Manual

Variable attenuation substrate 60 x 35 x 2 mm3 with inverse characteristic for high thermal stability. Compensator plate 60 x 35 x 2 mm3 to compensate for any beam displacement. With manual knob and digital scale for accurate transmittance setting. Electromagnetic shutter.

Attenuator Module, Motorized

Variable attenuation substrate 60 x 35 x 2 mm3 with inverse characteristic for high thermal stability. Compensator plate 60 x 35 x 2 mm3 to compensate for any beam displacement. With DC motor and encoder, ACM RS-232 interface module, interface cables, and control software for Microsoft Windows. Electromagnetic shutter.

Attenuator Module for 157 nm

Leak-tight module housing with an observation window. Variable attenuation substrate 60 x 35 x 2 mm3 with inverse characteristic for high thermal stability. Compensator plate 60 x 35 x 2 mm3 to compensate for any beam displacement. Manual knob and digital scale for transmittance setting. Electromagnetic shutter. Flanges for tube connections and vacuum exhaust. Purge gas inlet and exhaust gas outlet with gate valve.

Features & Benefits

Specifications

Wavelength (nm) Attenuator Module, Manual (Part No.) Attenuator Module, Motorized (Part No.)
Attenuator Module for 157 nm (Part No.)
157 Not Available Not Available
1111338
193 2910218 1116186
Not Available
248 2910216 2910566
Not Available
308 1116181 1116184
Not Available
351 116182 2910568
Not Available

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​​Homogenizers - Superior Optics and Coatings

Because excimer lasers produce high-energy pulses of ultraviolet light, the materials used to make the optics must be carefully selected and the optics themselves must be carefully designed. You can rely on our deep knowledge and many years of experience to deliver the exact solutions you need.

Specifications

Homogenizer 5 x 5 Homogenizer 10 x 10
Homgenizer 20 x 20
Homogenized Field Size (mm) 5 x 5 10 x 10
20 x 20
Zoom ±10% ±10%
±10%
Homogeneity <±5% <±5%
<±5%
Field Position Entrance aperture Entrance aperture
Entrance aperture
Appox. 600 mm after Homogenizer Exit (depending on wavelength) 32 x 32 mm, overall size entrance-exit approx. 1100 mm (depending on wavelength) 29.6 x 29.6 mm, overall size entrance-exit approx. 1000 mm (depending on wavelength)
29.6 x 29.6 mm, overall size entrance-exit approx. 900 mm (depending on wavelength)
Other versions on request Field dimensions from 4 x 4 mm up to 200 mm
Part No. 193 nm 1116198 1116202
Part No. 248 nm 1116199 1116203
Part No. 308 nm 1116200 1116204
Part No. 351 nm 1116201 1116205


Projection Lenses
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P-lens 4-10x/4-xxx P-lens 5x/18-xxx P-lens 5x/30-xxx Doublet 50-xxx
Doublet 100-xxx
Wavelength (nm) 157
157
193 193 193
248 248 248 248
308 308 308 308 308
351 351 351
Demagnification 4 to 10x (higher demagnification on request) 5x 5x Variable
Variable
Focal Length (mm) Approx. 100 Approx. 50
Approx. 100
Image Field Diameter (mm) 4 18 30 Depending on wavelength
Depending on wavelength
Numerical Aperture Depending on wavelength (diffraction-limited for all available wavelengths) 0.13 (diffraction limited) 0.1 (diffraction limited)
Spatial Resolution (µm) 3 lines and spaces 2 lines and spaces 2.5 lines and spaces 50 lines and spaces 50 lines and spaces
Working Distance Depending on wavelength, use of eye piece, and demagnification Depending on wavelength Depending on wavelength Approx. 35 mm Approx. 70 mm
Tracking Length Depending on wavelength, use of eye piece, and demagnification 800 mm 1050 mm Depending on wavelength and demagnification ratio Depending on wavelength and demagnification ratio
Transmission >80% >80% >80% - -
Part No. 157 nm 1116211 1116216
Part No. 193 nm 9680011 1116198 1116212 1116217
Part No. 248 nm M290009 M290022 1137121 1116213 1116218
Part No. 308 nm 1116206 M290008 9680052 1116214 2921330
Part No. 351 nm 1116207 1116201 1116215 1116219

Please Read Before Continuing

Risk factors: Except for the historical information contained here, many of the matters discussed in this Web site are forward-looking statements, based on expectations at the time they were made, that involve risks and uncertainties that could cause our results to differ materially from those expressed or implied by such statements. These risks are detailed in the “Factors That May Affect Future Results” section of our latest 10-K or 10-Q filing. Coherent assumes no obligation to update these forward-looking statements.


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